Calibration of Deposition Rate by SEM
To calibrate the deposition rate of the SiNx and SiO2 films, two methods were adopted. In the first one, a single multilayered fiber was fabricated with alternating layers of SiNx and SiO2 with increasing deposition times. Later, several fibers were coated with single layer of either SiNx or SiO2. SEM images of the coated films were processed to obtain the deposition rate.