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COMSOL Script for a 3mm Differential Microphone Diaphragm

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Description

This file is written in COMSOL script to create a 3mm diaphragm design and calculate the frequency response due to a incident sound pressure on the diaphragm.

 

Define geometric parameters

xmasklength                                                  Note this is half the total chip (mask) width
ymasklength                                                  Note this is half the total chip (mask) width
xdiaph                                                            Half of diaphragm length
ydiaph                                                            Half of diaphragm width
twidth                                                             Half of T-section width
tlength                                                            Length of T-section
slit                                                                  Width of slits
space                                                             Space between the edge of skin and the end where the stiffeners end. For fabrication, this space is required.
skint                                                               Thickness of diaphragm skin
stifft                                                                Thickness of stiffeners
stiffdepth                                                        Depth of stiffeners
openinglength                                               Width of central openings
openingwidth                                                 Length of central openings

Design of a 3mm Directional Microphone Diaphragm using COMSOL Graphical User Interface

 

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